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SILICON MICRO-TRENCH ETCHING USING HIGH-DENSITY PLASMA ETCHER H.C.Yu1,M.B. Chen1,J.M. Miao2,Z.G.Liu1,T.T. Sun1 (1.Physics Department of ShanghaiJiaotong University, Shanghai 200240, China;2.Micromachine Center, School of Mechanical and Production Engineering, Nanyang Technological University, 639798, Singapore) Abstract:Dry etching of silicon is an essential process step for the fabrication......
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Simulation and prediction in laser bending of silicon sheet WANG Xu-yue, XU Wei-xing, XU Wen-ji, HU Ya-feng, LIANG Yan-de, WANG Lian-ji Key Laboratory for Precision and Non-traditional Machining... silicon sheet (0.2 mm in thickness) was investigated with JK701 Nd:YAG laser. The models were developed to describe the beam characteristics of pulsed laser. In order to simulate the process of laser......
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Dielectric properties of doped silicon carbide powder by thermal diffusion SU Xiao-lei(苏晓磊), LI Zhi-min(李智敏), LUO Fa(罗 发), WANG Xiao-yan(王晓艳), ZHU Dong-mei(朱冬梅), ZHOU Wan-cheng(周万城) State Key... the aluminum and nitrogen atoms affect the bond of silicon and carbon. The dielectric real part (ε′) and imaginary part (ε") of the nitrogen-doped sample are higher than those of the other samples......
PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM H.Shen1,Z.Y.Liu2,Y.F.Hu2,L.S.Wen2 (1.Guangzhou Institute of Energy Conversion, The Chinese Academy of Sciences, Guangzhou 510070, China;2.College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China) Abstract:Poly-crystalline silicon thin film has big potential of reducing the cost......
Article ID: 1003-6326(2005)03-0510-05 Preparation and properties of continuous Al-containing silicon carbide fibers YU Yu-xi(余煜玺), LI Xiao-dong(李效东), CAO Feng(曹 峰), WANG Ying-de(王应德... resistance than the Tyranno SA fibers. Key words: continuous silicon carbide fibers; polyaluminocarbosilane; polymer pyrolysis CLC number: TQ343.6  ......
Preparation and dielectric properties of porous silicon nitride ceramics LI Jun-qi(李军奇), LUO Fa(罗 发), ZHU Dong-mei(朱冬梅), ZHOU Wan-cheng(周万城) State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an 710072, China Received 10 April 2006; accepted 25 April 2006 Abstract: Porous silicon nitride ceramics with difference volume fractions......
Selective growth of carbon nanotube on silicon substrates ZOU Xiao-ping(邹小平) 1,2,3,4, H. ABE3, T. SHIMIZU 3, A. ANDO5, H. TOKUMOTO 3,6, ZHU Shen-ming(朱申敏)4, ZHOU Hao-shen(周豪慎)4  ... 25 April 2006 Abstract: The carbon nanotube (CNT) growth of iron oxide-deposited trench-patterns and the locally-ordered CNT arrays on silicon substrate were achieved by simple thermal chemical......